Optimizing ecosystem service supply is an inevitable way to realize the harmonious development of human society and natural ecosystem. The complex transformation modes between equilibrium and non-equilibrium of ecosystem and interaction mechanism make it difficult to study the formation mechanism of ecosystem services. How to scientifically interpret the internal regulation mechanism of ecosystem services is the key to realize the transformation from natural resource utilization to ecosystem function optimization. In this paper, the driving mechanism of ecosystem regime shift is discussed, as well as the steady-state transformation paths after disturbance and the response mode of ecosystem function to disturbance are clarified. The theory connotation and change process of ecosystem services are deeply interpreted from the perspective of regime shift. The theoretical framework of ecosystem services is developed based on the core chain of structure - process - function-service-human welfare-sustainability, and the responses of ecosystem services to structural and functional changes are discussed from the intrinsic attributes of ecosystem sensitivity and resilience. The feed-back effects among ecosystem services are analyzed when land use change exceeds ecosystem thresholds. The paper reviews the formation process and interaction mechanism of ecosystem service from the perspective of regime shift in order to provide a new viewpoint for ecosystem services research and ecosystem management.