The current sustainable development level of urban industrial land could be accurately judged by researching the eco-efficiency of urban industrial land, which is of great significance for conservation and intensive land use. Super-SBM model is used to calculate the eco-efficiency of urban industrial land in 30 provinces (cities and districts) from 2000 to 2016 and to analyze the spatio-temporal characteristics of urban industrial land eco-efficiency as well as the empirical analysis of influencing factors by using panel data model. The results showed that:(1) The eco-efficiency of urban industrial land use outnumbered a downward trend from 2000 to 2016, with an overall decrease of 5.81% and annual average decrease of 0.35%, containing a characteristic of a two-stage change of "decrease firstly and then increase" during the process. (2) The cities with effective eco-efficiency of urban industrial land use outnumber those of ineffective eco-efficiency. Hainan was ranked top according to the ecological efficiency on average, followed by Beijing and Shanghai and the last three were Sichuan, Jiangxi, and Shanxi. (3) The number of eco-efficient provinces (cities and districts) decreased greatly firstly and then increased slightly. The effective regions had transferred from eastern, northwestern, and northeastern regions to southeastern regions, northeast economic developed coastal regions, northwestern regions and northern regions in China. (4) The means of ecological efficiency of urban industrial land in descending order was respectively South China, North China, East China, Northwest China, Northeast China, Southwest China, and central China from 2000 to 2016. There were significant differences in the eco-efficiency of urban industrial land among regions and the regional differences enlarged with the development of urban industry. (5) The strength of environmental regulation, industrial agglomeration and industrial opening to the outside world played a significant positive role in promoting the ecological efficiency of urban industrial land whereas economic development level, the level of land marketization and industrial property structure played the opposite role and the industrial energy consumption structure and industrial structure had no significant effect on ecological efficiency. In the end of the paper, there was a detailed discussion about the limitations of data and index selection in this study and the key directions of future research.